ESI OpenShort™ Defect Size Metrology Product
Any experienced defect team member from any semiconductor fab
acknowledges there exists big uncertainty in defect size of the inline
defect file. For example, a big-size defect was predicted to cause an
open or short failure killer defect. On the contrary, frustration happens
when the SEM image verifies a nuisance defect, not a failure defect.
More than a decade long, many defect team experts in Semiconductor
fabs have been searching for the solution unsuccessfully.
Elite Semiconductor Inc. has already discovered our unique defect
size metrology solution. Nuisance defects are falsely classified into killer
defects because of incorrect defect size measurement results. The ESI
OpenShort™ Defect Size Metrology Product can successfully classify
those false nuisance defects correctly.
