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The OpenShort™ Platform includes the OpenShort™ Coordinate Conversion Product, the OpenShort™ Smart defect screen and sample product, and the OpenShort™ Defect size metrology product.
The OpenShort™ Coordinate Conversion Product can accurately convert
the inline defect coordinate of a defect file into the corresponding design layout coordinate.
The OpenShort™ Smart defect screen and sample product can discover
true failure defects superior to traditional method with enormous breakthrough.
It will benefit fab to achieve better wafer yield and shorten time to mass production.
More than that, the OpenShort™ Defect size metrology product can enhance
performance of the OpenShort™ Smart defect screen and sample product to a
constant high-level nuisance defect filter rate.