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ESI OpenShort™ Platform includes the ESI OpenShort™ Coordinate Conversion Product, the ESI OpenShort™ Smart defect screen and sample product, and the ESI OpenShort™ Defect size metrology product
The ESI OpenShort™ Coordinate Conversion Product can
accurately convert the inline defect coordinate of a defect file into the
corresponding design layout coordinate.
The ESI OpenShort™ Smart defect screen and sample product
can discover true failure defects superior to traditional method with
enormous breakthrough. It will benefit fab to achive better wafer yield
and shorten time to mass production.
More than that, ESI OpenShort™ Defect size metrology product
can enhance performance of ESI OpenShort™ Smart defect screen
and sample product to a constant high-level nuisance defect filter rate.