ESI OpenShort™ Platform

   ESI OpenShort™ Platform includes the ESI OpenShort™ Coordinate Conversion Product, the ESI OpenShort™ Smart defect screen and sample product, and the ESI OpenShort™ Defect size metrology product

  The ESI OpenShort™ Coordinate Conversion Product can accurately convert the inline defect coordinate of a defect file into the corresponding design layout coordinate.
  The ESI OpenShort™ Smart defect screen and sample product can discover true failure defects superior to traditional method with enormous breakthrough. It will benefit fab to achive better wafer yield and shorten time to mass production.
  More than that, ESI OpenShort™ Defect size metrology product can enhance performance of ESI OpenShort™ Smart defect screen and sample product to a constant high-level nuisance defect filter rate.